SH

Song Huang

Lam Research: 1 patents #55 of 153Top 40%
📍 Tangxia, CA: #4 of 9 inventorsTop 45%
Overall (2004): #113,518 of 270,089Top 45%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6821378 Pump baffle and screen to improve etch uniformity John Daugherty, Neil Benjamin 2004-11-23