Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830622 | Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof | John Daugherty | 2004-12-14 |
| 6790242 | Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof | Christopher C. Chang, John Daugherty | 2004-09-14 |
| 6780787 | Low contamination components for semiconductor processing apparatus and methods for making components | — | 2004-08-24 |
| 6773751 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | John Daugherty, Christopher C. Chang | 2004-08-10 |