Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806100 | Molded end point detection window for chemical mechanical planarization | Patrick P. Wu, Xuyen Pham | 2004-10-19 |
| 6790128 | Fluid conserving platen for optimizing edge polishing | Travis R. Taylor | 2004-09-14 |
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, David Wei, Tony Luong | 2004-07-13 |
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Jeff Gasparitsch, Robert Taff, Kenneth J. Bahng, Paul H. Stasiewicz, Erik H. Engdahl | 2004-05-04 |
| 6712679 | Platen assembly having a topographically altered platen surface | Travis R. Taylor, Kevin T. Crofton, Eugene Zhao | 2004-03-30 |