Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821195 | Carrier head having location optimized vacuum holes | Ren Zhou, Raisa Khavinson | 2004-11-23 |
| 6806100 | Molded end point detection window for chemical mechanical planarization | Cangshan Xu, Patrick P. Wu | 2004-10-19 |
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Cangshan Xu, David Wei, Tony Luong | 2004-07-13 |
| 6755723 | Polishing head assembly | — | 2004-06-29 |
| 6746313 | Polishing head assembly in an apparatus for chemical mechanical planarization | Anthony de la Llera | 2004-06-08 |
| 6732017 | System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system | Tuan Nguyen, Vien Quach, Ren Zhou | 2004-05-04 |
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Anthony de la Llera, Andrew Siu, Tuan Nguyen, Tony Luong | 2004-03-30 |