Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Anthony de la Llera, Xuyen Pham, Tuan Nguyen, Tony Luong | 2004-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Anthony de la Llera, Xuyen Pham, Tuan Nguyen, Tony Luong | 2004-03-30 |