Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, Cangshan Xu, David Wei | 2004-07-13 |
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Anthony de la Llera, Xuyen Pham, Andrew Siu, Tuan Nguyen | 2004-03-30 |