Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761626 | Air platen for leading edge and trailing edge control | Xuyen Pham, Cangshan Xu, David Wei, Tony Luong | 2004-07-13 |
| 6746313 | Polishing head assembly in an apparatus for chemical mechanical planarization | Xuyen Pham | 2004-06-08 |
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Xuyen Pham, Andrew Siu, Tuan Nguyen, Tony Luong | 2004-03-30 |