Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821195 | Carrier head having location optimized vacuum holes | Xuyen Pham, Raisa Khavinson | 2004-11-23 |
| 6732017 | System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system | Xuyen Pham, Tuan Nguyen, Vien Quach | 2004-05-04 |