Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Cangshan Xu, Jeff Gasparitsch, Robert Taff, Kenneth J. Bahng, Erik H. Engdahl | 2004-05-04 |
| 6716093 | Low friction gimbaled substrate holder for CMP apparatus | Erik H. Engdahl, Michael D. Steiman | 2004-04-06 |