Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716093 | Low friction gimbaled substrate holder for CMP apparatus | Erik H. Engdahl, Paul H. Stasiewicz | 2004-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716093 | Low friction gimbaled substrate holder for CMP apparatus | Erik H. Engdahl, Paul H. Stasiewicz | 2004-04-06 |