Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746320 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Glenn W. Travis, James Bagley | 2004-06-08 |
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Cangshan Xu, Jeff Gasparitsch, Robert Taff, Kenneth J. Bahng, Paul H. Stasiewicz | 2004-05-04 |
| 6716093 | Low friction gimbaled substrate holder for CMP apparatus | Michael D. Steiman, Paul H. Stasiewicz | 2004-04-06 |