Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790128 | Fluid conserving platen for optimizing edge polishing | Cangshan Xu | 2004-09-14 |
| 6769970 | Fluid venting platen for optimizing wafer polishing | Alan J. Jensen | 2004-08-03 |
| 6752898 | Method and apparatus for an air bearing platen with raised topography | Robert Luke Anderson, Robert Charatan | 2004-06-22 |
| 6712679 | Platen assembly having a topographically altered platen surface | Cangshan Xu, Kevin T. Crofton, Eugene Zhao | 2004-03-30 |