Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6769970 | Fluid venting platen for optimizing wafer polishing | Travis R. Taylor | 2004-08-03 |
| 6752698 | Method and apparatus for conditioning fixed-abrasive polishing pads | Peter Renteln, David S. Lamb | 2004-06-22 |