Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6758726 | Partial-membrane carrier head | — | 2004-07-06 |
| 6752698 | Method and apparatus for conditioning fixed-abrasive polishing pads | Alan J. Jensen, David S. Lamb | 2004-06-22 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6758726 | Partial-membrane carrier head | — | 2004-07-06 |
| 6752698 | Method and apparatus for conditioning fixed-abrasive polishing pads | Alan J. Jensen, David S. Lamb | 2004-06-22 |