Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yoshinori Nakayama, Yasunari Sohda, Hiroya Ohta, Masato Muraki, Masaki Takakuwa | 2004-07-27 |
| 6730916 | Electron beam lithography apparatus | Hiroshi Tsuji, Mitsuru Inoue, Yasuhiro Someda, Yoshimasa Fukushima | 2004-05-04 |