Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809319 | Electron beam writing equipment and electron beam writing method | Yasunari Sohda, Osamu Kamimura, Susumu Gotoh | 2004-10-26 |
| 6784442 | Exposure apparatus, control method thereof, and device manufacturing method | Masato Muraki, Shin Hashimoto | 2004-08-31 |
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yoshinori Nakayama, Yasunari Sohda, Norio Saitou, Masato Muraki, Masaki Takakuwa | 2004-07-27 |