Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835937 | Correcting method for correcting exposure data used for a charged particle beam exposure system | Yoshikiyo Yui | 2004-12-28 |
| 6818911 | Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method | Kenji Tamamori, Yuichi Iwasaki, Yoshinori Nakayama, Kouji Asano, Yoshiaki Moro +1 more | 2004-11-16 |
| 6784442 | Exposure apparatus, control method thereof, and device manufacturing method | Hiroya Ohta, Shin Hashimoto | 2004-08-31 |
| 6777697 | Charged-particle beam exposure apparatus and device manufacturing method using the same | Yoshikiyo Yui | 2004-08-17 |
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yoshinori Nakayama, Yasunari Sohda, Hiroya Ohta, Norio Saitou, Masaki Takakuwa | 2004-07-27 |