Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835937 | Correcting method for correcting exposure data used for a charged particle beam exposure system | Masato Muraki | 2004-12-28 |
| 6777697 | Charged-particle beam exposure apparatus and device manufacturing method using the same | Masato Muraki | 2004-08-17 |
| 6741732 | Exposure method and device manufacturing method using this exposure method | — | 2004-05-25 |