Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818911 | Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method | Kenji Tamamori, Masato Muraki, Yoshinori Nakayama, Kouji Asano, Yoshiaki Moro +1 more | 2004-11-16 |