Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818911 | Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method | Kenji Tamamori, Masato Muraki, Yuichi Iwasaki, Kouji Asano, Yoshiaki Moro +1 more | 2004-11-16 |
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yasunari Sohda, Hiroya Ohta, Norio Saitou, Masato Muraki, Masaki Takakuwa | 2004-07-27 |