Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809319 | Electron beam writing equipment and electron beam writing method | Hiroya Ohta, Osamu Kamimura, Susumu Gotoh | 2004-10-26 |
| 6768118 | Electron beam monitoring sensor and electron beam monitoring method | Yoshinori Nakayama, Hiroya Ohta, Norio Saitou, Masato Muraki, Masaki Takakuwa | 2004-07-27 |