Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6744054 | Evacuation use sample chamber and circuit pattern forming apparatus using the same | Masaki Mizuochi, Yoshimasa Fukushima | 2004-06-01 |
| 6730916 | Electron beam lithography apparatus | Hiroshi Tsuji, Norio Saitou, Yasuhiro Someda, Yoshimasa Fukushima | 2004-05-04 |