Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794665 | Electron beam drawing apparatus | Masaki Kurihara, Toshihiko Horiuchi, Yoshimasa Fukushima | 2004-09-21 |
| 6744054 | Evacuation use sample chamber and circuit pattern forming apparatus using the same | Yoshimasa Fukushima, Mitsuru Inoue | 2004-06-01 |