Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794665 | Electron beam drawing apparatus | Masaki Kurihara, Toshihiko Horiuchi, Masaki Mizuochi | 2004-09-21 |
| 6744054 | Evacuation use sample chamber and circuit pattern forming apparatus using the same | Masaki Mizuochi, Mitsuru Inoue | 2004-06-01 |
| 6730916 | Electron beam lithography apparatus | Hiroshi Tsuji, Mitsuru Inoue, Norio Saitou, Yasuhiro Someda | 2004-05-04 |