Issued Patents 2004
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6684172 | Sensor to predict void free films using various grating structures and characterize fill performance | Ramkumar Subramanian, Steven C. Avanzino, Christopher F. Lyons, Khoi A. Phan, Bharath Rangarajan +1 more | 2004-01-27 |
| 6673524 | Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication method | Kouros Ghandehari, Bruno M. LaFontaine | 2004-01-06 |