Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825467 | Apparatus for scanning a crystalline sample and associated methods | Jennifer Lynn Drown, Kim Elshot, Terri Lynn Shofner, Tingkwan Cheung | 2004-11-30 |
| 6783426 | Method and apparatus for detection of chemical mechanical planarization endpoint and device planarity | Jennifer Lynne Drown, Kim Elshot, Tingkwan Cheung | 2004-08-31 |
| 6750447 | Calibration standard for high resolution electron microscopy | Catherine Vartuli, John M. McIntosh, Fred Stevie | 2004-06-15 |
| 6727720 | Probe having a microstylet | Ryan Maynard, John M. McIntosh, Larry E. Plew, Jeffrey B. Bindell | 2004-04-27 |
| 6714892 | Three dimensional reconstruction metrology | John M. McIntosh, Larry E. Plew | 2004-03-30 |
| 6713409 | Semiconductor manufacturing using modular substrates | Michael J. Antonell, Nitin M. Patel, Larry E. Plew, Catherine Vartuli | 2004-03-30 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Scott Jessen, John M. McIntosh, Catherine Vartuli, Fred Stevie | 2004-03-23 |
| 6695572 | Method and apparatus for minimizing semiconductor wafer contamination | Michael J. Antonell, Larry E. Plew, Catherine Vartuli, Jennifer Juszczak | 2004-02-24 |