Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798043 | Structure and method for isolating porous low-k dielectric films | Kurt G. Steiner, Susan Clay Vitkavage, Steve Lytle, Gerald W. Gibson | 2004-09-28 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, John M. McIntosh, Catherine Vartuli, Fred Stevie | 2004-03-23 |