Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750447 | Calibration standard for high resolution electron microscopy | Erik Cho Houge, John M. McIntosh, Fred Stevie | 2004-06-15 |
| 6713409 | Semiconductor manufacturing using modular substrates | Michael J. Antonell, Erik Cho Houge, Nitin M. Patel, Larry E. Plew | 2004-03-30 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, Scott Jessen, John M. McIntosh, Fred Stevie | 2004-03-23 |
| 6695572 | Method and apparatus for minimizing semiconductor wafer contamination | Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Jennifer Juszczak | 2004-02-24 |