Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6695572 | Method and apparatus for minimizing semiconductor wafer contamination | Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Catherine Vartuli | 2004-02-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6695572 | Method and apparatus for minimizing semiconductor wafer contamination | Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Catherine Vartuli | 2004-02-24 |