Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713409 | Semiconductor manufacturing using modular substrates | Erik Cho Houge, Nitin M. Patel, Larry E. Plew, Catherine Vartuli | 2004-03-30 |
| 6695572 | Method and apparatus for minimizing semiconductor wafer contamination | Erik Cho Houge, Larry E. Plew, Catherine Vartuli, Jennifer Juszczak | 2004-02-24 |