Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750447 | Calibration standard for high resolution electron microscopy | Erik Cho Houge, Catherine Vartuli, John M. McIntosh | 2004-06-15 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, Scott Jessen, John M. McIntosh, Catherine Vartuli | 2004-03-23 |