Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661070 | Micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Joel A. Kubby, Peter M. Gulvin, Chuang-Chia Lin, Jingkuang Chen | 2003-12-09 |
| 6567448 | Scanning III-V compound light emitters integrated with Si-based actuators | Decai Sun, Ross D. Bringans, Christopher L. Chua, Philip D. Floyd, Eric Peeters +1 more | 2003-05-20 |
| 6510275 | Micro-optoelectromechanical system based device with aligned structures and method for fabricating same | Joel A. Kubby, Jingkuang Chen, Peter M. Gulvin, Kathleen A. Feinberg, Yi-Nien Su | 2003-01-21 |
| 6506620 | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization | Bruce R. Scharf, Joel A. Kubby, Chuang-Chia Lin, Andrew J. Zosel, Peter M. Gulvin +1 more | 2003-01-14 |