Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506620 | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization | Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran, Andrew J. Zosel, Peter M. Gulvin +1 more | 2003-01-14 |