Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661070 | Micromechanical and microoptomechanical structures with single crystal silicon exposure step | Joel A. Kubby, Peter M. Gulvin, Chuang-Chia Lin, Jingkuang Chen, Alex T. Tran | 2003-12-09 |
| 6506620 | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization | Bruce R. Scharf, Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran, Peter M. Gulvin +1 more | 2003-01-14 |