Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661070 | Micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Joel A. Kubby, Chuang-Chia Lin, Jingkuang Chen, Alex T. Tran | 2003-12-09 |
| 6572218 | Electrostatically-actuated device having a corrugated multi-layer membrane structure | Elliott A. Eklund | 2003-06-03 |
| 6508947 | Method for fabricating a micro-electro-mechanical fluid ejector | Elliott A. Eklund | 2003-01-21 |
| 6510275 | Micro-optoelectromechanical system based device with aligned structures and method for fabricating same | Alex T. Tran, Joel A. Kubby, Jingkuang Chen, Kathleen A. Feinberg, Yi-Nien Su | 2003-01-21 |
| 6506620 | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization | Bruce R. Scharf, Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran, Andrew J. Zosel +1 more | 2003-01-14 |