Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661070 | Micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Joel A. Kubby, Peter M. Gulvin, Jingkuang Chen, Alex T. Tran | 2003-12-09 |
| 6583031 | Method of making a MEMS element having perpendicular portion formed from substrate | — | 2003-06-24 |
| 6506620 | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization | Bruce R. Scharf, Joel A. Kubby, Alex T. Tran, Andrew J. Zosel, Peter M. Gulvin +1 more | 2003-01-14 |