Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654155 | Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material | Michel A. Rosa | 2003-11-25 |
| 6647036 | Integration and alignment of VCSEL's with MEMS using micromachining and flip-chip techniques | Michel A. Rosa | 2003-11-11 |
| 6580858 | Micro-opto-electro-mechanical system (MOEMS) | Jingkuang Chen, Joel A. Kubby | 2003-06-17 |
| 6574256 | Distributed feedback laser fabricated by lateral overgrowth of an active region | Daniel Hofstetter, Thomas L. Paoli, Linda Romano, David P. Bour, Michael A. Kneissl +2 more | 2003-06-03 |
| 6567448 | Scanning III-V compound light emitters integrated with Si-based actuators | Ross D. Bringans, Christopher L. Chua, Philip D. Floyd, Eric Peeters, Joel A. Kubby +1 more | 2003-05-20 |
| 6548908 | Structure and method for planar lateral oxidation in passive devices | Christopher L. Chua, Philip D. Floyd, Thomas L. Paoli | 2003-04-15 |
| 6545335 | Structure and method for electrical isolation of optoelectronic integrated circuits | Christopher L. Chua, Philip D. Floyd, Thomas L. Paoli | 2003-04-08 |
| 6532093 | Integrated micro-opto-electro-mechanical laser scanner | Michel A. Rosa, Chingwen Yeh | 2003-03-11 |