Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654155 | Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material | Decai Sun | 2003-11-25 |
| 6647036 | Integration and alignment of VCSEL's with MEMS using micromachining and flip-chip techniques | Decai Sun | 2003-11-11 |
| 6632373 | Method for an optical switch on a substrate | Eric Peeters, David K. Fork | 2003-10-14 |
| 6632374 | Method for an optical switch on a silicon on insulator substrate | Eric Peeters | 2003-10-14 |
| 6549691 | Optical cross switching system | Robert A. Street, Eric Peeters, Jeng Ping Lu, Christopher L. Chua | 2003-04-15 |
| 6532093 | Integrated micro-opto-electro-mechanical laser scanner | Decai Sun, Chingwen Yeh | 2003-03-11 |
| 6504643 | Structure for an optical switch on a substrate | Eric Peeters, David K. Fork | 2003-01-07 |