Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668628 | Scanning probe system with spring probe | Thomas Hantschel, Eugene M. Chow | 2003-12-30 |
| 6658728 | Method for fabricating a spring structure on a substrate | Jackson Ho, Rachel Lau, JengPing Lu | 2003-12-09 |
| 6655964 | Low cost integrated out-of-plane micro-device structures and method of making | Christopher L. Chua, Koenraad Van Schuylenbergh, Noble M. Johnson, David K. Biegelsen | 2003-12-02 |
| 6646533 | Photolithographically-patterned out-of-plane coil structures and method of making | David K. Biegelson, Christopher L. Chua | 2003-11-11 |
| 6632373 | Method for an optical switch on a substrate | Michel A. Rosa, Eric Peeters | 2003-10-14 |
| 6621141 | Out-of-plane microcoil with ground-plane structure | Koenraad Van Schuylenbergh, Christopher L. Chua | 2003-09-16 |
| 6595787 | Low cost integrated out-of-plane micro-device structures and method of making | Ping Mei, Koenraad Van Schuylenbergh | 2003-07-22 |
| 6582989 | Photolithographically-patterned out-of-plane coil structures and method of making | David K. Biegelsen, Christopher L. Chua | 2003-06-24 |
| 6560861 | Microspring with conductive coating deposited on tip after release | Christopher L. Chua | 2003-05-13 |
| 6534249 | Method of making low cost integrated out-of-plane micro-device structures | Christopher L. Chua | 2003-03-18 |
| 6528350 | Method for fabricating a metal plated spring structure | — | 2003-03-04 |
| 6504643 | Structure for an optical switch on a substrate | Eric Peeters, Michel A. Rosa | 2003-01-07 |