Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655964 | Low cost integrated out-of-plane micro-device structures and method of making | David K. Fork, Koenraad Van Schuylenbergh, Noble M. Johnson, David K. Biegelsen | 2003-12-02 |
| 6646533 | Photolithographically-patterned out-of-plane coil structures and method of making | David K. Biegelson, David K. Fork | 2003-11-11 |
| 6621844 | Buried oxide photonic device with large contact and precise aperture | David W. Treat | 2003-09-16 |
| 6621141 | Out-of-plane microcoil with ground-plane structure | Koenraad Van Schuylenbergh, David K. Fork | 2003-09-16 |
| 6606235 | Photolithographically-patterned variable capacitor structures and method of making | Eric Peeters, Koenraad Van Schuylenbergh, Donald L. Smith | 2003-08-12 |
| 6582989 | Photolithographically-patterned out-of-plane coil structures and method of making | David K. Biegelsen, David K. Fork | 2003-06-24 |
| 6567448 | Scanning III-V compound light emitters integrated with Si-based actuators | Decai Sun, Ross D. Bringans, Philip D. Floyd, Eric Peeters, Joel A. Kubby +1 more | 2003-05-20 |
| 6560861 | Microspring with conductive coating deposited on tip after release | David K. Fork | 2003-05-13 |
| 6549691 | Optical cross switching system | Robert A. Street, Eric Peeters, Michel A. Rosa, Jeng Ping Lu | 2003-04-15 |
| 6548908 | Structure and method for planar lateral oxidation in passive devices | Philip D. Floyd, Thomas L. Paoli, Decai Sun | 2003-04-15 |
| 6545335 | Structure and method for electrical isolation of optoelectronic integrated circuits | Philip D. Floyd, Thomas L. Paoli, Decai Sun | 2003-04-08 |
| 6534249 | Method of making low cost integrated out-of-plane micro-device structures | David K. Fork | 2003-03-18 |