Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667249 | Minimizing coating defects in low dielectric constant films | Yu-Hui Chen, Yao-Yi Cheng | 2003-12-23 |
| 6623654 | Thin interface layer to improve copper etch stop | Bi-Trong Chen, Lain-Jong Li, Syun-Ming Jang, Shu E Ku, Lih-Ping Li | 2003-09-23 |
| 6620745 | Method for forming a blocking layer | Syan-Mang Jang, Lain-Jong Li, Shwang-Ming Jeng | 2003-09-16 |
| 6602780 | Method for protecting sidewalls of etched openings to prevent via poisoning | Tsu Shih, Yung-Cheng Lu, Lih-Ping Li, Chung-Chi Ko | 2003-08-05 |
| 6518183 | Hillock inhibiting method for forming a passivated copper containing conductor layer | Weng Chang, Ying-Ho Chen, Syun-Ming Jang | 2003-02-11 |