Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654109 | System for detecting surface defects in semiconductor wafers | Lain-Jong Li, Syun-Ming Jang | 2003-11-25 |
| 6602779 | Method for forming low dielectric constant damascene structure while employing carbon doped silicon oxide planarizing stop layer | Lain-Jong Li, Yung-Cheng Lu | 2003-08-05 |
| 6602780 | Method for protecting sidewalls of etched openings to prevent via poisoning | Tsu Shih, Yung-Cheng Lu, Lih-Ping Li, Tien-I Bao | 2003-08-05 |