Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657284 | Graded dielectric layer and method for fabrication thereof | Shwang-Ming Jeng, Syun-Ming Jang, Chen-Hua Yu | 2003-12-02 |
| 6654109 | System for detecting surface defects in semiconductor wafers | Chung-Chi Ko, Syun-Ming Jang | 2003-11-25 |
| 6645864 | Physical vapor deposition of an amorphous silicon liner to eliminate resist poisoning | Cheng-Chung Lin | 2003-11-11 |
| 6623654 | Thin interface layer to improve copper etch stop | Bi-Trong Chen, Syun-Ming Jang, Shu E Ku, Tien-I Bao, Lih-Ping Li | 2003-09-23 |
| 6620745 | Method for forming a blocking layer | Syan-Mang Jang, Tien-I Bao, Shwang-Ming Jeng | 2003-09-16 |
| 6602779 | Method for forming low dielectric constant damascene structure while employing carbon doped silicon oxide planarizing stop layer | Yung-Cheng Lu, Chung-Chi Ko | 2003-08-05 |