Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645864 | Physical vapor deposition of an amorphous silicon liner to eliminate resist poisoning | Lain-Jong Li | 2003-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645864 | Physical vapor deposition of an amorphous silicon liner to eliminate resist poisoning | Lain-Jong Li | 2003-11-11 |