Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647998 | Electrostatic charge-free solvent-type dryer for semiconductor wafers | Ming-Dar Guo, Tsung-Chieh Tsai, Sheng-Hsiung Tseng, Wei-Ming You, Yao-Pin Huang +3 more | 2003-11-18 |
| 6642128 | Method for high temperature oxidations to prevent oxide edge peeling | Ching-Shan Lu, Kuo-Bin Huang | 2003-11-04 |
| 6620725 | Reduction of Cu line damage by two-step CMP | Shau-Lin Shue, Ming-Hsing Tsai, Wen-Jye Tsai, Ying-Ho Chen, Tsu Shih +1 more | 2003-09-16 |
| 6589356 | Method for cleaning a silicon-based substrate without NH4OH vapor damage | Juin-Jie Chang, Rong-Hui Kao | 2003-07-08 |
| 6589872 | Use of low-high slurry flow to eliminate copper line damages | Ying-Ho Chen, Tsu Shih, Syun-Ming Jang | 2003-07-08 |
| 6503333 | Method for cleaning semiconductor wafers with ozone-containing solvent | Rong-Hui Kao, Chia-Chun Cheng | 2003-01-07 |