Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589356 | Method for cleaning a silicon-based substrate without NH4OH vapor damage | Juin-Jie Chang, Jih-Churng Twu | 2003-07-08 |
| 6503333 | Method for cleaning semiconductor wafers with ozone-containing solvent | Jih-Churng Twu, Chia-Chun Cheng | 2003-01-07 |