Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648743 | Chemical mechanical polishing pad | — | 2003-11-18 |
| 6642597 | Inter-layer interconnection structure for large electrical connections | William K. Barth | 2003-11-04 |
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack +3 more | 2003-09-09 |
| 6602112 | Dissolution of metal particles produced by polishing | Tony Quan Tran, Vikas Sachan, David Gettman, Terence M. Thomas, Craig Lack | 2003-08-05 |
| 6582283 | Polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Lee Melbourne Cook, David Shidner | 2003-06-24 |