Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664188 | Semiconductor wafer with a resistant film | — | 2003-12-16 |
| 6641631 | Polishing of semiconductor substrates | Craig Lack, Steven P. Goehringer | 2003-11-04 |
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack +3 more | 2003-09-09 |
| 6607424 | Compositions for insulator and metal CMP and methods relating thereto | Wesley D. Costas, James Shen, Glenn C. Mandigo, Craig Lack, Ross E. Barker, II | 2003-08-19 |
| 6605537 | Polishing of metal substrates | Jinru Bian, Tirthankar Ghosh | 2003-08-12 |
| 6602112 | Dissolution of metal particles produced by polishing | Tony Quan Tran, Vikas Sachan, David Gettman, Craig Lack, Peter A. Burke | 2003-08-05 |
| 6530824 | Method and composition for polishing by CMP | Qianqiu Ye, Joseph So, Wendy Goldberg, Wade Godfrey | 2003-03-11 |