Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Craig Lack, Terence M. Thomas +3 more | 2003-09-09 |