Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641631 | Polishing of semiconductor substrates | Terence M. Thomas, Steven P. Goehringer | 2003-11-04 |
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Terence M. Thomas +3 more | 2003-09-09 |
| 6607424 | Compositions for insulator and metal CMP and methods relating thereto | Wesley D. Costas, James Shen, Glenn C. Mandigo, Terence M. Thomas, Ross E. Barker, II | 2003-08-19 |
| 6602112 | Dissolution of metal particles produced by polishing | Tony Quan Tran, Vikas Sachan, David Gettman, Terence M. Thomas, Peter A. Burke | 2003-08-05 |
| 6602436 | Chemical mechanical planarization of metal substrates | Glenn C. Mandigo, Ross E. Barker, II, Ian Sullivan, Wendy Goldberg | 2003-08-05 |
| 6568997 | CMP polishing composition for semiconductor devices containing organic polymer particles | Wesley D. Costas, Daniel A. Saucy | 2003-05-27 |